最近の成果: イオンビームを用いた新しい分析技術の開発
最近の成果: イオンビームを用いた新しい分析技術の開発
★高分解能RBSの大幅な感度向上に成功した
➡バリア構造とマイラ膜で迷イオンを低減
➡coincidence計測によって暗ノイズを低減
➡Si中の10 ppmのAsの検出が可能になった.
Fig. 2. Examples of the HRBS spectra before improvement (closed circles) and after installation of barriers and the Mylar foil (open circles). The spectrum measured in coincidence with secondary electrons is shown by triangles. A spectrum measured without ion beam (dark noise) is also shown by squares. All spectra are normalized to the measurement time. The concentration of As is shown on the right-hand ordinate.
1)H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, and K. Kimura, "Improvement of sensitivity in high-resolution Rutherford backscattering spectroscopy," Review of Scientific Instruments 82 (6) (2011).